Compact R-X-Y Stage and Dual-Finger Micromanipulator under Inverted Optical Microscope for Microassembly
Jichao Pang, Zhuo Chen, Yan Chen, Yuke Li, Yunsheng Li, Qiang Huang, Tatsuo Arai, Xiaoming Liu
Abstract
Microassembly plays an important role in fabricating complex structures with small basic components in industrial and biomedical fields. Inverted optical microscope could provide high-quality image feedback for microassembly with its continuously improving resolution. However, a compact stage capable of positioning and reorienting micro-objects while fitting within the limited space under an inverted optical microscope remains unavailable. This paper proposes a compact R-X-Y stage that can transport micro-objects over long distances in the X and Y directions, and reorient the objects by the 360-degree continuous rotation. Additionally, different from commonly putting the rotational stage on the X-Y stage, we mount the thin X-Y stage on a rotational stage. Thus, after aligning the centers of the visual field and rotational stage at the beginning, all the visiable micro-objects will not move out of the visual field during the rotation. We further integrate the R-X-Y stage and the dual-finger micromanipulator, and then use them to assemble 2-D patterns and complex 3-D micromachine. The obtained results and preliminary demonstration indicate that the proposed compact R-X-Y has great potential in assembling complex micromachines.
BibTeX
@inproceedings{iros2025_compactrxystagea,
title = {Compact R-X-Y Stage and Dual-Finger Micromanipulator under Inverted Optical Microscope for Microassembly},
author = {Jichao Pang and Zhuo Chen and Yan Chen and Yuke Li and Yunsheng Li and Qiang Huang and Tatsuo Arai and Xiaoming Liu},
booktitle = {IROS 2025},
year = {2025}
}