2025
Data-Driven Fault Detection for Wafer Scanner Cable Slabs using Koopman Operators
Michael Pumphrey, Mohammad Al Saaideh, Yazan Mohammad Al-Rawashdeh, Natheer Alatawneh, Khaled Aljanaideh, Almuatazbellah M. Boker +1
IROS 2025
The reliability of precision motion systems, such as semiconductor wafer scanners, is often influenced by nonlinear dynamics originating from components such as cable slabs. This paper introduces a data-driven framework for early fault diagnosis in these systems. Koopman operator theory is employed