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Guojin Chen

5 accepted papers

2026

Fast Inverse Lithography via GRPO Reinforced Flow Matching

ICML 2026poster

In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask. As circuit features shrink below the wavelength of light, optical diffraction causes the printed patterns to deviate from their intended layouts. Inverse Lithography Technology (ILT) add…

Cited by 0SourceScholar
2025

AnalogCoder: Analog Circuit Design via Training-Free Code Generation

AAAI 2025technical

Analog circuit design is a significant task in modern chip technology, focusing on the selection of component types, connectivity, and parameters to ensure proper circuit functionality. Despite advances made by Large Language Models (LLMs) in digital circuit design, the complexity and scarcity of da…

2025

Intelligent OPC Engineer Assistant for Semiconductor Manufacturing

AAAI 2025technical

Advancements in chip design and manufacturing have enabled the processing of complex tasks such as deep learning and natural language processing, paving the way for the development of artificial general intelligence (AGI). AI, on the other hand, can be leveraged to innovate and streamline semiconduc…

Cited by 1SourcePDFScholar
2024

PACE: Pacing Operator Learning to Accurate Optical Field Simulation for Complicated Photonic Devices

NeurIPS 2024poster

Electromagnetic field simulation is central to designing, optimizing, and validating photonic devices and circuits. However, costly computation associated with numerical simulation poses a significant bottleneck, hindering scalability and turnaround time in the photonic circuit design process. Neur…