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Xuyuan Xiong

3 accepted papers

2026

Fast Inverse Lithography via GRPO Reinforced Flow Matching

ICML 2026poster

In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask. As circuit features shrink below the wavelength of light, optical diffraction causes the printed patterns to deviate from their intended layouts. Inverse Lithography Technology (ILT) add…

Cited by 0SourceScholar
2026

Taming Polysemanticity in LLMs: Theory-Grounded Feature Recovery via Sparse Autoencoders

ICLR 2026poster

We study the challenge of achieving theoretically grounded feature recovery using Sparse Autoencoders (SAEs) for the interpretation of Large Language Models. Existing SAE training algorithms often lack rigorous mathematical guarantees and suffer from practical limitations such as hyperparameter sen…

Cited by 0SourcecodeScholar
2025

SPOT: Scalable Policy Optimization with Trees for Markov Decision Processes

NeurIPS 2025poster

Interpretable reinforcement learning policies are essential for high-stakes decision-making, yet optimizing decision tree policies in Markov Decision Processes (MDPs) remains challenging. We propose SPOT, a novel method for computing decision tree policies, which formulates the optimization problem…

Cited by 0SourceScholar