Calibration System and Algorithm Design for a Soft Hinged Micro Scanning Mirror With a Triaxial Hall Effect Sensor
Micro scanning mirrors (MSMs) extend the range and field of view of LiDARs, medical imaging devices, and laser projectors. However, a new class of soft-hinged MSMs contains out-of-plane translation in addition to the 2 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http: