Songwei Zhu

Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage

Lightly-damped dynamics of a flexure-based mechanism will tend to largely deteriorate the broadband control performance if its hysteresis nonlinearity has been compensated. This paper developed a novel damped piezo-driven decoupled XYZ nanopositioning stage, which consists of three orthogonal parall…