2021
Model Predictive Control With Obstacle Avoidance for Inertia Actuated AFM Probes Inside a Scanning Electron Microscope
RA-L 2021
The Atomic Force Microscope (AFM) is a reliable tool for 3D imaging and manipulation at the micrometer and nanometer scales. When used inside a Scanning Electron Microscope (SEM), AFM probes can be localized and controlled with a nanometer resolution by visual feedback. However, achieving trajectory