10 accepted papers
This letter presents a method to determine and control the center of rotation of a parallel micro-robotic platform used as a sample holder for an Atomic Force Microscope (AFM). The AFM is operating inside a Scanning Electron Microscope (SEM) for correlative AFM in SEM imaging. The objective is to sp
This paper presents a functionality that has been developed for the home-made AFM-in-SEM robotic system at the ISIR laboratory. The method allows extending the range of an Atomic Force Microscope (AFM) and dealing with drift issues by fusing multiple individually AFM topography patches. The merging…
This article proposes a method for the correction of angular deviations caused during the fixing process of samples prepared for Atomic Force Microscopy (AFM). The correction is done using the angular control of a 6-DOF PPPS parallel platform were the sample is placed, while the AFM scan is performe…
The spherical joint is an effective solution to design parallel micro-robotic systems with rotation capabilities in the three-dimensional space. This type of joint has however some non-linear characteristics, such as the clearance, which affect the positioning accuracy in micro-robotic tasks. The st…
The Atomic Force Microscope (AFM) is a reliable tool for 3D imaging and manipulation at the micrometer and nanometer scales. When used inside a Scanning Electron Microscope (SEM), AFM probes can be localized and controlled with a nanometer resolution by visual feedback. However, achieving trajectory
Active force sensors are key instruments to get around the tradeoff between the sensitivity and the measurement range of conventional passive force sensors. Thanks to their quasi-infinite stiffness in closed loop, active sensors can be applied for force measurements on samples with a wide range of s…
Collaborative robotics allows merging the best capabilities of humans and robots to perform complex tasks. This allows the user to interact with remote and directly inaccessible environments such as the micro-scale world. This interaction is made possible by the bidirectional exchange of information…
Scanning Electron Microscopy (SEM) is an ideal observation tool for small scales robotics. It has the potential to achieve automated nano-robotic tasks such as nano-handling and nano-assembly. Path following control of nano-robot end effectors using SEM vision feedback is a key for an intuitive prog…
In order to define trajectory-tracking strategies for nano-robotic systems using piezoelectric stick-slip actuators, the dynamics of the elementary actuator must be studied and well modeled. The modeling of this class of actuators is complex because several nonlinear parameters are involved. In this…
This paper addresses modeling issues for a class of nano-robotic systems using piezoelectric stick-slip actuators. The work focuses on the friction force modeling to describe the dynamics of a stick-slip actuator in a wide operating range needed in nano-robotics. Based on the theory of the single st…