3 accepted papers
This letter presents a method to determine and control the center of rotation of a parallel micro-robotic platform used as a sample holder for an Atomic Force Microscope (AFM). The AFM is operating inside a Scanning Electron Microscope (SEM) for correlative AFM in SEM imaging. The objective is to sp
This paper presents a functionality that has been developed for the home-made AFM-in-SEM robotic system at the ISIR laboratory. The method allows extending the range of an Atomic Force Microscope (AFM) and dealing with drift issues by fusing multiple individually AFM topography patches. The merging…
This article proposes a method for the correction of angular deviations caused during the fixing process of samples prepared for Atomic Force Microscopy (AFM). The correction is done using the angular control of a 6-DOF PPPS parallel platform were the sample is placed, while the AFM scan is performe…