Frédéric Delarue

Robotic Mosaic Atomic Force Microscopy Through Sequential Imaging and Multiview Iterative Closest Points Method

This paper presents a functionality that has been developed for the home-made AFM-in-SEM robotic system at the ISIR laboratory. The method allows extending the range of an Atomic Force Microscope (AFM) and dealing with drift issues by fusing multiple individually AFM topography patches. The merging…