2022
A PZT-Driven 6-DOF High-Speed Micromanipulator for Circular Vibration Simulation and Whirling Flow Generation
RA-L 2022
Existing micromanipulation methods, whether contact micromanipulation or non-contact micromanipulation, can hardly meet the requirements of low damage and multiple functions in the biomedical field. This study provides a high-speed micromanipulator that can simulate circular vibrations and generate