A New 1-mg Fast Unimorph SMA-Based Actuator for Microrobotics
We present a new unimorph actuator for micro-robotics, which is driven by thin shape-memory alloy (SMA) wires. Using a passive-capillary-alignment technique and existing SMA-microsystem fabrication methods, we developed an actuator that is 7 mm long, has a volume of 0.45 mm3, weighs 0.96 mg, and can…