ChengYu Zou

Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing

In semiconductor manufacturing, to improve the throughput of cluster tools, <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">process modules</i> (PMs) are designed to have multiple spaces such that more than one wafers can be processed in a PM concurr