GengHong Wang — accepted AI-conference papers

2024

Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing

ChengYu Zou, GengHong Wang, Lei Gu, Jie Li, NaiQi Wu, Yan Qiao

RA-L 2024

In semiconductor manufacturing, to improve the throughput of cluster tools, <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">process modules</i> (PMs) are designed to have multiple spaces such that more than one wafers can be processed in a PM concurr

Cited by 4 Source ↗Scholar ↗

2022

Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types

Qinghua Zhu, GengHong Wang, Yan Hou, Naiqi Wu, Yan Qiao

RA-L 2022

To satisfy the requirements of high-mix integrated-circuit chip production, multiple wafer types are grouped into a lot to be fabricated concurrently in a multi-cluster tool system. However, the existing studies do not solve the scheduling problem of multi-cluster tools with multiple wafer types bei

Cited by 27 Source ↗Scholar ↗