3 accepted papers
In semiconductor manufacturing, to improve the throughput of cluster tools, <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">process modules</i> (PMs) are designed to have multiple spaces such that more than one wafers can be processed in a PM concurr
To satisfy the requirements of high-mix integrated-circuit chip production, multiple wafer types are grouped into a lot to be fabricated concurrently in a multi-cluster tool system. However, the existing studies do not solve the scheduling problem of multi-cluster tools with multiple wafer types bei
Semiconductor manufacturing industry has adopted multi-cluster tools as wafer fabrication equipment that is extraordinarily pricey but highly attractive owing to their higher productivity than single cluster tools can achieve. A challenging issue is how to schedule these tools. It is especially diff…