3 accepted papers
Cluster tools are vital in semiconductor manufacturing, where multifunctional process modules (MPMs) enhance flexibility and efficiency. However, variable MPMs and processing time in dual-arm cluster tools (DACTs) complicate scheduling, as variable MPM allocation patterns yield distinct productivity
To satisfy the requirements of high-mix integrated-circuit chip production, multiple wafer types are grouped into a lot to be fabricated concurrently in a multi-cluster tool system. However, the existing studies do not solve the scheduling problem of multi-cluster tools with multiple wafer types bei
Semiconductor manufacturing industry has adopted multi-cluster tools as wafer fabrication equipment that is extraordinarily pricey but highly attractive owing to their higher productivity than single cluster tools can achieve. A challenging issue is how to schedule these tools. It is especially diff…