2020
On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse
IROS 2020poster
Under the excitation of acoustic radiation, the amount of energy absorbed and rebounded by cells have the relationship with mechanical properties, e.g. stiffness, shape, weight and so on. In this paper, a femtosecond laser-activated micro-detector is designed to convert this relationship into an ele…