8 accepted papers
A novel method for analyzing the dynamics and bend geometry of a cable slab via trained neural networks is introduced. Neural networks are trained from real-time visual feedback capture via a high-speed camera during cyclic motion to track the positions of multiple markers affixed to the cable slab…
To enhance the precision of coarse long-stroke motion axes, complementary short-stroke fine positioning stages are usually introduced. Being mechanically attached, the motion of the combined positioning stages needs to be controlled and synchronized. Therefore, typically suitable model-based control…
This paper introduces a position control system for a motion stage driven by a low-energy C-core reluctance actuator. The central concept explored here is the utilization of a variable air gap to enable energy-efficient operation of the motion stage. First, we show the design and mathematical model…
In semiconductor manufacturing, lithography machines are becoming more and more sophisticated system of systems. As an example, a TWINSCAN wafer scanner machine is composed of a wafer, and reticle handlers, reticle, optics, and two wafer chains or systems. In previous studies, we covered the interac…
In this paper, an immune average consensus behavior of distributed trajectory generators given in the form of a multi-agent system is presented. Starting with the well-known results of linear consensus protocols, we propose a decomposition of the invariant consensus value to enable a distributed cyb…
Stretching the definition of the standard Sine profile allows building a generalized symmetric frequency-aware basis function that can be used to generate reference motion trajectories. Other profiles such as polynomials, sigmoid, and harmonic-based models can be equally used under the proposed tech…
Mainly, the integration of fine positioning piezo-actuated stages in precision motion systems is considered, which results in multi-stage configurations. Mostly, in such configurations, the fine stages are attached to the coarse positioning stages- that do not meet required precision- by mechanical…
Adopting the ideal reliable machine model, the throughput of a lithography machine can be given as the reciprocal of the operation time. This time can be defined at the die level where the actual exposure process takes place as the time unit per die. A closer look at the motion profiles, namely step…