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Richard Chang

2 accepted papers

2022

On the Use of Component Structural Characteristics for Voxel Segmentation in Semicon 3D Images

ICASSP 2022accepted

Detecting defects buried inside chips is critical for failure analysis in semiconductor manufacturing. In this paper, we perform 3D voxel segmentation on 2.5D semicon chips to locate and identify defects that may be present in them. We integrate tree based Ensemble method with the Cascaded Anisotrop…

Cited by 0SourceScholar