7 accepted papers
High-precision wafer metrology poses significant cost and throughput challenges in modern semiconductor manufacturing, where frequent process changes and recipe variations demand highly adaptive and scalable solutions. In this paper, we present a Generative-FewShot-Active Virtual Metrology (GFA-VM) …
As semiconductor manufacturing complexity escalates, the intricacy of corresponding manufacturing systems intensifies. These extensive systems necessitate diverse engineering expertise for effective operation and analysis. For instance, yield engineers analyze yield systems, process engineers interp
Due to the short life cycles of electronic products, trial run lots of new products are crucial in IC packaging for production verification and engineering adjustments. The processing time of trial run lots may differ significantly from production lots due to engineering adjustments and is difficult
Monocular Depth Estimation is a popular and challenging problem for many years. IR CNNs (Convolutional Neural Networks)-based method with encoder-decoder architecture is proposed and shows a reasonable result. In this paper, we propose a SE-Net-based module for the decoder part in the encoder-decode…
Maintaining tool availability is the key to ensure machining quality. To evaluate tool availability so as to improve its utilization, the tool diagnosis models for tool-remaining-useful-life (RUL) estimation and tool-state classification are required. These models need sufficient samples to cover al
Electrocardiogram (ECG) is the recording of the heart electrical activity and used to diagnose heart disease nowadays. The diagnosis requires a large amount of time for acquiring enough multi-channel data normally. Thus storage and transmission of 12 lead ECG data will result in massive cost. In thi…
Industry 4.0 paves the way to smart factory through integrating Internet of Things, cyber-physical systems, cloud manufacturing, and big data analytics for various industrial fields. Especially, the machinery industry significantly benefits from these automation techniques in machine-tool quality in