10 accepted papers
The pursuit of high yield in semiconductor packaging manufacturing is hindered by the increasing complexity of monitoring and alarm systems, leading to alarm floods which not only interfere with operations but also mask critical issues affecting yield. Therefore, this letter proposes an Alarm Patter
Virtual Metrology (VM) technology can convert offline sampling inspection into online and real-time total inspection. As the processes of high-tech industries (semiconductor or TFT-LCD) are getting more sophisticated, higher VM prediction accuracy is demanded. With regard to this requirement, the ad
Root-cause Analysis (RCA) of alarms is a well-established research area in automated Production Systems (aPS). Many RCA algorithms have been proposed and successfully evaluated and new ones are being developed. Recently, researchers focus on the incorporation of formalized information about the tech
Chip-probing is the key process for IC manufacturing to its ensure quality. As the number of tests increases, the test quality and the test yield will be affected because the needles on the probe card of the tester will be contaminated by external objects or worn out. Whether a needle polish of the
To ensure stable processing and high-yield production, high-tech factories (e.g., semiconductor, TFT-LCD) demand product quality total inspection. Generally speaking, sampling inspection only measures a few samples and comes with metrology delay, thus it usually cannot achieve the goal of real-time
To ensure stable manufacturing and high yield of production, factories (e.g., semiconductor or TFT-LCD fabs) conduct quality inspection on workpieces. They tend to adopt sampling inspection in consideration of reducing cost and cycle time, yet that fails to achieve real-time and online total inspect
For the current wafer sawing process, the wafers in the same lot are inspected at the end of the entire process. Therefore, a defect, such as chipping, occurs during processing will only be detected until the end of the process, which is too late and may cause massive defects. If Automatic Virtual M
Carbon fiber is currently one of the most popular composite materials in the world, with its wide applications ranging from bikes to space shuttles. However, there is no comprehensive method for the total quality inspection of carbon fiber products so far due to its feature of continuous production
Predictive maintenance aims to find out when the target device (TD) is in the sick state and almost entering the dead state before its actual occurrence to conduct just-in-time maintenance, so as to avoid unexpected TD down time. In this way, not only tool availability and manufacturing quality are
With the trend of even smaller workpieces and complicated processes in the semiconductor industry, yield enhancement becomes the crucial indicator of enterprise profits. However, the advancement of the manufacturing processes results in huge-and-complicated data, it becomes difficult to quickly sear